한국레이저가공학회지 (Laser Solutions)
- 제2권3호
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- Pages.52-61
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- 1999
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- 1229-0963(pISSN)
LIFT 방법에 의한 전도성 미세 패터닝 공정 연구
Micro patterning of conductor line by laser induced forward transfer(LIFT)
초록
The laser induced forward transfer(LIFT) technique employs a pulsed laser to transfer parts of a thin metal film from an optically transparent target onto an arbitrary substrate in close proximity to the metal film on the target. In this work, a two-step method, the combination of LIFT process, in which a Au film deposited on the
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