한국레이저가공학회지 (Laser Solutions)
- 제2권3호
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- Pages.32-41
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- 1999
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- 1229-0963(pISSN)
$Al_2O_3$ 세라믹의 순도별 미세구멍 가공특성
The Microhole Machining Characteristic According to Purity of the $Al_2O_3$ Ceramics
초록
This study is about Jig used in wiring when we make Probecard and Large Scale Intergrated Electronic Circuit. The most universal wiring method is molding with Bond. Polymer film is punched down and adhesives is applied after wiring. Due to shrinkage and modification many problems still have happened in the process of molding. To solve these problems, ceramic plate was introduced in the study. Using Laser, an experiment of microhole treatment on ceramic plate was proceeded. Laser energy, assistance gas, and special features by purity degree were analyzed with the 35W low capacity YAG-Laser. In the condition of energy 0.08J, frequency 20Hz and interval time 200
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