OPTICAL CHARACTERISTICS OF POROUS SILICON CARBIDE BY PHOTOLUMINESCENCE SPECTROSCOPY

  • Lee, Ki-Hwan (Dept. of Chemistry and The Research Institute for Basic Science, Kongju National University) ;
  • Du, Ying-Lei (Fundamental Physics Center, University of Science and Technology of china) ;
  • Lee, Tae-Ho (Dept. of Chemistry and The Research Institute for Basic Science, Kongju National University)
  • Published : 1999.12.01

Abstract

We have been prepared the porous silicon carbide (PSC) by electrochemical etching of silicon carbide single crystals. Samples of PSC have been studied by the methods of scanning electron microscope (SEM) and photoluminescence (PL). Two PL bands attributed to the blue and green light emission were observed in this study. According to the anodization conditions, the main source of emission in the oxidized layers of PSC lies in the different surface defect centers which consist of different geometrical structures due to the polytypes. It means that origin of these PL bands may be existed in different size pores simultaneously. The present results indicate that the high energy band comes from the top porous layers while the low energy band comes from the lower porous layers.

Keywords

References

  1. Appl. Phys. Lett. v.57 Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers Canham, L. T.
  2. Solid State Commun. v.95 Photoluminescence and electroluminescence in partially oxidized porous silicon Tsybeskov, L.;S. P. Duttagupta;P. M. Fauchet
  3. Appl. Phys. Lett. v.65 Violet luminescence from anodized microcrystalline silicon Zhao, X.;O. Schoenfeld;Y. Aoyagi;T. Sugano
  4. Solid State Commun. v.97 Ultra-violet light emission from oxidized porous silicon Lin, J.;G. Q. Yao;J. Q. Duan;G. G. Qin
  5. Appl. Phys. Lett. v.69 A comparative study of ultraviolet emission with peak wavelengths around 350 nm from oxidized porous silicon and that from $SiO_2$ powder Qin, G. G.;J. Lin;J. Q. Duan;G. Q. Yao
  6. Appl. Phys. Lett. v.60 Luminescence degradation in porous silicon Tischler, M. A.;R. T. Collins;J. H. Stathis;J. C. Tsang
  7. J. Appl. Phys. v.70 Atmospheric impregnation of porous silicon at room temperature Canham, L. T.;M. R. Houlton;W. Y. Leong;C. Pickering;J. M. Keen
  8. Electron Lett. v.31 Electroluminescent porous silicon device with an external quantum efficiency greater than 0.1% under CW operation Loni, A.;A. J. Simons;T. I. Cox;P. D. J. Calcott;L. T. Canham
  9. Solid State Commun. v.106 Stable blue-green and ultraviolet photoluminescence from silicon carbide on porous silicon Liu, R.;B. Yang;Z. Fu;P. He;Y. Ruan
  10. Phys. Rev. v.127 Inequivalent sites and multiple donor and acceptor levels in SiC polytypes Patrick, L.
  11. Semiconductors v.29 Investigation of porous silicon carbide by methods of vibrational and luminescence spectroscopy Danishevskii, A. M.;V. B. Shuman;A. Yu. Rogachev;P. A. Ivanov
  12. Appl. Phys. Lett. v.60 Photo electrochemical conductivity selective etch stops for SiC Shor, J. S.;R. M. Osgood;A. D. Kurtz
  13. J. Electrochem. Soc. v.139 Laser assisted photoelectrochemical etching of n-type beta-SiC Shor, J. S.;Z. G. Zhang;R. M. Osgood
  14. Appl. Phys. Lett. v.62 Direct observation of porous SiC formed by anodization in HF Shor, J. S.;I. Grimberg;B. Z. Weiss;A. D. Kurtz
  15. J. Appl. Phys. v.71 Luminescence and structural study of porous silicon films Xie, Y. H.;W. L. Wilson;F. M. Ross;J. A. Mucha;E. A. Fitzgerald;J. M. Macaulay;T. D. Harris
  16. J. Electrochem. Soc. v.143 Multiple source quantum well model of porous silicon light emission Zhang, S. L.;Y. Chen;L. Jia;J. J. Li;F. M. Huang;T. Zhu;X. Wang;Z. F. Liu;S. M. Cai
  17. Appl. Phys. Lett. v.60 Optical properties of free-standing silicon quantum wires Sanders, G. D.;Y. C. Chang
  18. Appl. Phys. Lett. v.66 Photoluminescence studies of porous silicon carbide Konstantinov, A. O.;A. Henry;C. I. Harris;E. Janzen
  19. Appl. Phys. Lett. v.64 Behavior of porous silicon emission spectra during quenching by immersion in metal ion solutions Andsager, D.;J. Hilliard;M. H. Nayfeh