Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)
- Volume 6 Issue 2
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- Pages.45-49
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- 1999
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- 1226-9360(pISSN)
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- 2287-7525(eISSN)
The effect of initial Pd catalyst oxidation stale on CH$_4$ sensitivity of SnO$_2$ thin film sensor
Pd 촉매의 부분 산화 조절을 이용한 SnO$_2$ 박막 센서의 CH$_4$ 감도 변화 연구
- Choi, W. K. (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Cho, J. (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Cho, J. S. (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Song, J. H. (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Jung, H. J. (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Koh, S. K. (Thin Film Technology Research Center, Korea Institute of Science and Technology)
- 최원국 (한국과학기술연구원, 박막기술연구센터) ;
- 조정 (한국과학기술연구원, 박막기술연구센터) ;
- 조준식 (한국과학기술연구원, 박막기술연구센터) ;
- 송재훈 (한국과학기술연구원, 박막기술연구센터) ;
- 정형진 (한국과학기술연구원, 박막기술연구센터) ;
- 고석근 (한국과학기술연구원, 박막기술연구센터)
- Published : 1999.06.01
Abstract
A flammable gas sensor based on the
이온빔 보조 증착법을 이용하여 제작한
Keywords