A Study on the Design and Fabrication of the Planar Light Waveguide type $2\times32$ Optical Coupler

평면도파로형 $2\times32$ 광커플러의 설계와 제작에 관한 연구

  • 신기수 (한국통신 가입자망연구소 정회원) ;
  • 최영복 (한국통신 가입자망연구소 정회원) ;
  • 류근호 (충북대학교 컴퓨터과학과 정회원) ;
  • 문동찬 (광운대학교 전자재료공학과 정회원)
  • Published : 1999.12.01

Abstract

The $2\times32$ coupler consists of Mach-Zehnder interferometer and Y branch coupler. For the designs of this coupler, three dimensional rectangular core waveguide decomposed to two-dimensional structure by the effective index method. To optimize the waveguide structure, the confinement factor was investigated with two-dimensional finite difference Beam Propagation Method. The $2\times32$ coupler fabricated by simulation with height between Mach-Zehnder arms, H=$43.6\mu\textrm{m}$(path difference $0.668\mu\textrm{m}$) was showed best characteristics. In the results of dry etching of core layer, the etching rate of core layer was above 2600${\AA}$/min, the etching ratio of SiO2 to Al mask was 30:1 and the uniformity of etching was $\pm$5%. The maximum insertion loss and the uniformity of $2\times32$ coupler were below 19.2dB, 2dB respectively.

$2\times32$ 커플러는 마하젠더 간섭기와 Y분기 커플러로 구성하여 제작하였다. 커플러의 설계를 위해 유효굴절율법을 이용하여 3차원의 도파로 구조를 2차원 구조로 대체하였고 2차원 유한차분 빔전파법을 이용하여 도파로 구조에 대한 최적의 설계요소를 찾아내었다. 전산모사에 의하여 두 도파로 간의 높이가 $43.6\mu\textrm{m}$(경로차 $0.668\mu\textrm{m}$)로 제작한 $2\times32$ 커플러가 가장 우수한 특성을 나타냈다. 코아층의 식각 특성에 있어서 산화실리콘과 마스크인 알루미늄의 식각비는 30:1이었고 코아의 식각률은 2600${\AA}$/min이었다. 식각 균일도는 $\pm$5% 내외로 균일하였다. $2\times32$ 커프럴의 삽입 손실은 최대 손실이 19.2dB 이하였고 균일성은 2dB이였다.

Keywords

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