한국진공학회지 (Journal of the Korean Vacuum Society)
- 제8권3B호
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- Pages.327-332
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- 1999
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- 1225-8822(pISSN)
실시간 분광 엘립소미트리를 이용한 크롬 박막의 성장연구
Growth studies of chromium thin films using real-time spectroscopic ellipsometry
초록
High speed real-time spectroscopic ellipsometry was employed in order to characterize the growth of chromium thin film. This instrument can collect 512 points of {
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