Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 8 Issue 3B
- /
- Pages.327-332
- /
- 1999
- /
- 1225-8822(pISSN)
Growth studies of chromium thin films using real-time spectroscopic ellipsometry
실시간 분광 엘립소미트리를 이용한 크롬 박막의 성장연구
Abstract
High speed real-time spectroscopic ellipsometry was employed in order to characterize the growth of chromium thin film. This instrument can collect 512 points of {
Keywords