전자 현미경 영상의 혼합 잡음제거 알고리즘에 관한 연구

Design of mixed noise reduction algorithm for SEM image

In this paper, the SEM image processing system based on PC is designed, and a new noise reduction filtering algorithm is proposed. The SEM image obtained in semiconductor processing line is sensitive to noise, the weighted-D filter can remove uniform and Gaussian noise effectively, but can not remove impulse noise properly, A new improved filtering algorithm is proposed to reduce mixed-noise. The performance of the proposed filter is quantitatively evaluated by use of the normalized mean square errors (NMSE). The experimental results show that the performance of the proposed filter is obtained between 0.96 and 2.5 times better than that of weighted-D filter in NMSE evaluation.