한국진공학회지 (Journal of the Korean Vacuum Society)
- 제8권3A호
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- Pages.245-248
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- 1999
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- 1225-8822(pISSN)
Dc magnetron sputtering system을 이용한 TFT-LCD를 위한 Al-Nd와 Al-Zr 박막 특성에 관한 연구
characteristics of Al-Nd and Al-Zr thin film for TFT-FCD by DC magnetron sputtering system
초록
Recently low resistance of gate line or data line is required for large screen size TFT-LCD panels. As a result, lower resistance Al-alloy is currently reviewed extensively and the resistivity is required smaller than 10
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