한국진공학회지 (Journal of the Korean Vacuum Society)
- 제8권4A호
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- Pages.456-460
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- 1999
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- 1225-8822(pISSN)
Piezo Q-Switched Nd:YAG 레이저에 의한 초미니 전자빔 장치용 Micron-Size Aperture의 레이저 미세가공
Laser micromachining of micron-size aperture for electron beam microcolumn application using the piezo-switched Nd:YAG laser
초록
Experimental studies of laser micromachining on Mo diaphragm using piezo Q-switched Nd:YAZ laser have been performed. Application of miniaturized micorcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope (SEM) application have recently extensively examined. The conventional microcolumn fabrication technique would give a limitation on the minimization of aberration, In this paper, we obtained 20~30
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