한국진공학회지 (Journal of the Korean Vacuum Society)
- 제8권4A호
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- Pages.432-437
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- 1999
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- 1225-8822(pISSN)
보급형 He-Ne 타원해석기의 제작과 $TiO_2$ 박막 유효밀도 변화의 in-situ 측정
Fabrication of He-Ne ellipsometer and in-situ measurement of effective density variation of $TiO_2$ thin films
초록
We have fabricated an in situ ellipsometer operating at He-Ne wavelength. It can be applied to the real-time, in-situ tracking of the ellisometric change which occurs during various sample treatments. As a rotating analyzer type, all optical elements and related parts are designed to share a common hollow-axis configuration, and hence the ellipsometer is compact in shape and simple in design. It is mountable on the spare ports of vacuum chamber with ease. Using this ellipsometer, we observed the effective density variation of previously grown
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