한국진공학회지 (Journal of the Korean Vacuum Society)
- 제8권4A호
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- Pages.403-409
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- 1999
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- 1225-8822(pISSN)
Ar 플라즈마가 조사된 InP의 Photoreflectance 방법에 의한 표면상태 연구
A study of surface states in Ar plasma exposed InP measured by photoreflectance
초록
The surface state of Ar plasma-exposed Fe doped SI-InP have been investigated by photoreflectance (PR). From Ar plasma-exposed InP with 30 W for 10sec, the PR signals include a peak
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