Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 8 Issue 4B
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- Pages.530-535
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- 1999
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- 1225-8822(pISSN)
Fabrication and evaluation of NSOM apparatus
NSOM장치의 제작 및 특성 평가
Abstract
W made a near-field optical microscope(NSOM) apparatus and evaluated it. To control the distance between a tip and a sample, we used a piezoelectric translator and a He-Ne laser, and consequently obtained the spatial resolution better than 100nm. For the semiconductor spectroscopic applications, we performed photoluminescence and photocurrent experiments on the GaAs/AlGaAs MQWs samples. In the case of PL experiment, we obtained the low signal to nose ration due to the extremely small power of a light source passing through the nanometric optical fiber tip. However photocurrent experiment shows a hundred times better signal to noise than that of PL experiment. This suggests that photocurrent experiment using NSOM have the possibility to provide the spatial resolution better than 10nm.
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