한국진공학회지 (Journal of the Korean Vacuum Society)
- 제8권4B호
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- Pages.524-529
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- 1999
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- 1225-8822(pISSN)
전기 분해법을 이용한 다이아몬드 상 탄소 박막 증착에서의 암모니아수 첨가 효과
Adding effect of ammonia solution on deposition of diamond phase carbon thin films by electrolysis method
- 권민철 (동아대학교 물리학과) ;
- 김은미 (동아대학교 물리학과) ;
- 박홍준 (동아대학교 물리학과) ;
- 김용 (동아대학교 물리학과) ;
- 이재열 (동아대학교 물리학과) ;
- 신동혁 (동국대학교 물리학과)
- Kweon, Min-Cheol (Department of Physics, Dong-A University) ;
- Kim, Eun-Mi (Department of Physics, Dong-A University) ;
- Bark, Hong-Jun (Department of Physics, Dong-A University) ;
- Kim, Yong (Department of Physics, Dong-A University) ;
- Yi, Jae-Yel (Department of Physics, Dong-A University) ;
- Shin, Dong, Hyuk (Department of Physics, Dongguk University)
- 발행 : 1999.12.01
초록
We deposited diamond phase carbon thin films on Si substrate by the electrolysis of methanol solution. A little amount of ammonia solution was added to increase the current density of the electrolyte. We analyzed films by XRD and SEM. The chemical change of electrolyte during the electrolysis process was characterized by FTIR. We obtained better quality diamond phase carbon films at a lower applying boltage(300V) and temperature (
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