Journal of Korean Vacuum Science & Technology
- 제3권2호
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- Pages.130-133
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- 1999
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- 1226-6167(pISSN)
Dielectric properties of ZrTiO4 thin films deposited by DC magnetron reactive sputtering
- Kim, Taeseok (school of Materials science and Engineering Seoul National University) ;
- Park, Byungwoo (school of Materials science and Engineering Seoul National University) ;
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Hong, Kug-Sun
(school of Materials science and Engineering Seoul National University)
- 발행 : 1999.10.01
초록
Paraelectric ZrTiO4 thin films were synthesized on a Si(100) substrate using DC magnetron reactive sputtering. Films deposited above-400
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