Macroscopic and microscopic mass transfer in silicon czochralski method

  • 발행 : 1999.08.01

초록

First topic of this paper aims to clarify how oxygen and heat transfer in silicon melt under cusp-shaped magnetic fields. We obtained asymmetric temperature distribution by using time dependent and three-dimensional calculation. Second topic is study on molecular dynamics simulation, which was carried out to estimate diffusion constants of oxygen in silicon melt.

키워드

참고문헌

  1. J. Crystal Growth v.193 M. Watanabe(et al.)
  2. The Eleventh Symposium on Chemical Engineering Yoo Cheol Won;K. Kakimoto;H. Ozoe
  3. Chemical Engineering Science v.49 Z. Jiang;R.A. Brown
  4. J. Crystal Growth v.198;199 K. Kakimoto;S. Kikuch;H. Ozoe