High resolution Linear Encoder Using Interference Fringe

레이저의 간섭무늬를 이용한 리니어 엔코더에 관한 연구

  • 박윤창 (선문대학교 공과대학 기계 및 제어공학부)
  • Published : 1999.08.01

Abstract

The main scale of linear encoder greatly effects on the precision of displacement measurement. Especially when needing the long range measurement the length of main scale should be increased accordingly. In this paper we propose a linear encoder that uses laser interference pattern as main scale for long range measurement. The linear encoder is similar to Michelson interferometer excepting that the reference mirror is tilted so as to obtain interference fringe pattern and a grating panel is attached on a quadratic photo diodes. Four kinds of grating having phase difference of 0. $\pi$/4, $\pi$/2, 3$\pi$/4 are arranged on the panel. The experimental results show that signals of quadratic photo diode A, B, {{{{ {-}atop {A } }}}} and {{{{ {- } atop {B } }}}} are cosine wavelike and successive signals have phase difference of $\pi$/4 each other. So the proposed method can achieve improved measurement resolution.

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References

  1. Ann. CIRP. v.32 no.2 Current status in the future trends of ultra precision machining and ultrafine processing N. Taniguchi
  2. Ann. CIRP. v.42 no.2 Performance and Comparison Two Measuring System H. Kunzmann;T. Pfeifer
  3. Progress in Proc. Engg. Proc. of the 6th IPES/2nd UME Technology and Application of Grating Interferometers in High Precision Measurement A. Teimel
  4. Applied Optic. v.32 High accruracy displacement interferometry in air W. Tyler Estler
  5. Measurement v.9 no.1 A sensor for dimensional metrology with an interferometer using intergrated optics technology G. Ulbers
  6. 한국정밀공학회지 v.8 no.3 He-Ne 레이저를 이용한 고정밀 리니어 스케일의 제작에 관한 연구 한응교(외 5인)
  7. The Morie Method-A Review Cesar aA.Sciammarella
  8. Fundamentals of Optics(4th Ed.) F. A. Jenkins;H. E. White