Currently the technology of surface finishing is highly demanded in a wide range of industries. And many kinds of surface finishing technologies have been developed for each purpose. But it is still difficult to make a fine surface for the part which has three dimensional geometry. Now most of these kinds of complex parts are polished by hand by well skilled workers, This hand work process is inefficient and the production cost is high. Therefore it is desirable to develop a new finishing technology to solve problem In this study a new device was developed and tested in various test conditions.