저에너지 대면적 전자빔 발생장치 개발에 관한 연구

A Study on the Low-energy Large-aperture Electron Beam Generator

  • 조주현 (한국전기연구소 전기물리그룹) ;
  • 최영욱 (한국전기연구소 전기물리그룹) ;
  • 이홍식 (한국전기연구소 전기물리그룹) ;
  • 임근희 (한국전기연구소 전기물리그룹) ;
  • 우성훈 (한국전기연구소 전기물리그룹 위촉연구원) ;
  • 이광식 (영남대학교 전기전자공학부)
  • 발행 : 1999.12.01

초록

This research has been carried out to develop a low-energy large-aperture pulsed electron beam generator (LELA), 200keV 1A, for industrial applications. One of the most important feature of this electron beam generator is large electron beam cross section of $190cm^2$. Low energy electron beam generators have been used for water cleaning, flue gas cleaning, and pasteurization, etc. In these applications the cross sectionof the e-beam is related to reaction efficiency. Another important feature of this LELA EB generator is easy maintenance because of its simple structure and relatively low vacuum operation compared to the conventional EB generators. The conventional EB generators need to be scanned because the small cross section thermal electron emitters are used in the conventional EB generators which have small EB cross section. In this research, we use the secondary electrons generated by ion bombardment on the HV cathode surface as a electron source. Therefore we can make any shape of EB cross section without scanning.

키워드

참고문헌

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