S자형 들보에 의해 지지되는 micromirror의 제작 및 동작특성 분석

A Study on the Fabrication and Characterization of Micromirrors Supported by S-shape Girders

  • 발행 : 1999.11.01

초록

Micromirrors supported by S-shape girders were fabricated and their angular deflections were measured using a laser-based system. A micromirror consists of a $50\mum\times50\mum$ aluminum plate, posts and an S-shape girder. Two electrodes were deposited on two corners of the substrate beneath the mirror plate. $50\times50$micromirror array were fabricated using the Al-MEMS process. The electrostatic force caused by the voltage difference between the mirror plate and one of the electrodes causes the mirror plate to tilt until the girder touches the substrate. Bial voltage of the mirror plate is between 25~35V and signal pulse voltage on both electrodes is $\pm5V$. A laser-based system capable of real-time two-dimensional angular deflection measurement of the micromirror was developed. The operation of the system is based on measuring the displacement of a HeNe laser beam reflecting off the micromirror. The resonant frequency of the micromirror is 50kHz when the girder touches the substrate and it is 25 when the micromirror goes back to flat position, since the moving mass is about twice of the former case. The measurement results also revealed that the micromirror slants to the other direction even after the girder touches the substrate.

키워드

참고문헌

  1. Spatial light Modulators and Applications Ⅲ, SPIE Critical Reviews v.1150 Deformable-Mirror Spatial Light Modulators L. J. Hornbeck
  2. International Electron Devices Technical Digest Current Status of the Digital Micromirror Device(DMD) for Projection Television Applications L. J. Hornbeck
  3. SPIE proceedings v.3276 Automatic Test Equipment for the Micromirror Array H. Kim;K. C199ho;Y. K. Kim;J. W. Shin;H. J. Shin;J. H. Moon
  4. Proceeding of the IEEE A MEMS-Based Projection Display P. F. Van Kessel;L. J. Hornbeck;R. E. Meier;M. R. Douglass
  5. SPIE proceedings v.2641 Implementation of Hexagonal Micromirror Arrays as Phase-Mostly Spatial Light Modulators J. H. Cotois;V. M. Bright;S. C. Gustafson;A. Michalicek
  6. The 8th international Conference on Solid State Sensors and Actuators and Eurosensors Ⅸ v.71-PBI A High-Resolution Laser-Based Deflection Measurement System for Characterizing Aluminum Electrostatic Actuators Kenneth A. Honer;Nadim I. Maluf;Edwardo Martinez;Gregory T. A. Kovacs
  7. Measurement Systems(4th edition) E. O. Doebelin