Improvement of Sensitivity in Porous Silicon Alcohol Gas Sensors by UV Light

자외선조사에 의한 다공질 실리콘 알코올 센서의 감도 개선

  • 김성진 (경남대 전기전자공학부) ;
  • 최복길 (공주대 공대 전기공학과)
  • Published : 1999.09.01

Abstract

To do breath alcohol measurement, a sensor is necessary that it can detect low alcohol gas concentration of 0.01% at least. In this work, a capacitance-type alcohol gas sensor using porous silicon layer is developed to measure low alcohol gas concentration. The sensor using porous silicon layer has some sensitivity at room temperature by very large effective surface area, but there is still much room for improvement. In this experiment, we measured the capacitance of the sensor under 254 nm UV light on the porous silicon layer, in which alcohol solution was kept in a flask at 25, 35, and $45^{\circ}C$ by a heater. As the result, the improvement of sensitivity by illuminating UV light was observed. The increasing rate of the capacitance was shown to be double more than those measured under UV-off state. It is supposed that UV light activates response of the oriental and interfacial polarizations which have slow relaxation time for AC field.

Keywords

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