Fabrication of Cone-shaped Si Micro-tip Reflector Array for Alternating Current Thin Film Electroluminescent Device Application

교류 구동형 박막 전계 발광 소자용 원추형 Si micro-tip 반사체 어래이의 제작

  • 주병권 (KIST 정보재료소자센터 연구원) ;
  • 이윤희 (KIST 정보재료소자센터 연구원) ;
  • 오명환 (KIST 정보재료소자센터 연구원)
  • Published : 1999.09.01

Abstract

We fabricated AC-TFEL device having cone-shaped Si micro-tip reflector array based on the process which have been conventionally employed for the Si-tip field emitter array in FED system. As a result, the AC-TFEL device having a new geometrical structure could generate well concentrated visible white-light from 3600 reflectors/pixel under bipolar pulse excitation mode only by edge-emission mechanism.

Keywords

References

  1. IEEE Tr. Electron Devices v.44 no.1 White-light emitting thin-film electro-luminescent device using micromachined structure Y.H.Lee(et al.)
  2. J. Vac. Sci. Technol. v.B15 no.2 Fabrication and field emission study of gated diamond like-carbon-coated silicon tips S.Lee(et al.)