The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

A Study on the Pulsed Laser Deposition of Diamond like Carbon Thin Films

다이아몬드상 카본박막의 펄스레이저 증착법 연구

  • Published : 1999.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

We fabricated diamond like carbon (DLC) thin films using pulsed laser deposition (PLD) method. Among many deposition parameters, the effects of the deposition temperature and the laser energy density were investigated. Structural properties of the films were studied by Raman spectroscopy. The surface morphologies and cross-section imagies of the films were investigated by atomic force microscopy (AFM) and scanning electron microscopy (SEM) respctively. DLC thin films fabricated at $12 J/cm^2$ of a laser energy density and $300^{\circ}C$ of a deposition temperature showed the best quality.

Keywords

References

  1. Appl. Phys. Lett. v.71 no.23 A study of diamond field emission using micro-patterned monolithic diamond tips with different sp² contents A. wistisora-at;W. P. Kang;J. L. Davidson;D. V. Kerns
  2. Appl. Phys. Lett. v.70 no.12 Energy distribution of field emitted electrons from diamond coated molybdenum tips R. Schlesser;M. T. McClure;W. B. Choi;J. J. Hren;Z. Sitar
  3. Appl. Phys. Lett v.67 no.11 Direct-Current bias effect of the synthesis of (001) textured diamond films on silicon J. S. Lee;K. S. Liu;I. N. Lin
  4. Appl. Phys. Lett. v.71 no.16 Field emission properties of diamond films of different qualities N. A. Fox;W. N. Wang;T. J. Davis;J. W. Steeds;P. W. May
  5. Appl. Phys. Lett. v.69 no.6 Surface morphology of laser deposited diamondlike films by atomic force microscopy imaging Hwantae Park;Young-Kyu Hong;Jin Seung Kim;Chan Park
  6. 월간세라믹스 v.8 no.89 다이아몬드성 카본필름의 응용개발현황과 실용화 전망 이광렬
  7. J. Appl. Phys. v.42 no.7 Ion-Beam Deposition of Thin Films of Diamondlike Carbon Sol Aisenberg;Ronald Chabot
  8. IEEE Transactions of Electron Devices v.45 no.10 Effect of Diamond-like Carbon Coating on the Emission Characteristics of Molybdenum Field Emission Arrays Jae Hoon Jung;Byeong Kwon Ju;Hoon Kim;Yun Hi Lee;Suk Jae Chung;Jin Jang;Myung Hwan Oh
  9. J. Am. Ceram. Soc. v.81 no.4 Low-Temperature Synthesis of Diamondlike Carbon Films on Steel Substrates by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapor Deposition Shen Zhu;Fatemeh Shahedipour;Henry W. White
  10. Jpn. J. Appl. Phys. v.37 no.2 Structural, optical, and field emission properties of hydrogenated amorphous carbon films grown by helical resonator plasma enhanced chemical vapor deposition Jae Yeob Shim;Eung Joon Chi;Hong Koo Baik;Sung Man Lee
  11. Appl. Phys. Lett. v.69 no.23 Local electron field emission characteristics of pulsed laser deposited diamondlike carbon films F. Y. Chuang;C. Y. Sun;T. T. Chen;I. N. Lin
  12. Applied Surface Science v.92 Diamond- like coating prepared by pulsed laser sputtering of graphite in a high-vacuum environment I. A. Bogonin;A. L. Karuzskii;N. N. Melnik;Yu. A. Mityagin;V. N. Murzin;A. A. Orlikovsky;A. V. Tsikunov;N. A. Volchkov;B. G. Zhurkin
  13. 한국 정보디스플레이 학술대회 논문집 펄스 레이저 증착법에 의한 전계 방출기용 DLC 박막의 제작 방성식;이상렬;정해석;박형호
  14. The Korea-Japan Joint Workshop on Plasma Technologies and Applications Spectroscopic Study of Carbon Nitride Preparation by KrF Excimer Laser Ablation Shin-ichi Aoqui;Tomoaki Ikegami;Kenji Ebinhara
  15. 전기학회지 v.45 no.5 펄스 레이저 증착법의 원리와 응용 이상렬
  16. Applied Surface Science v.113;114 Effect of morphology on electron emission characteristics of pulsed laser deposited diamond-like films F. Y. Chuang;C. Y. Sun;H. F. Cheng;W. C. Wang;I. N. Lin
  17. Phys. Rev. B v.30 no.2 Modeling studies of amorphous carbon D. Beeman;J. Silverman;R. Lynds;M. R. Anderson
  18. Rhys. Rev. B v.29 no.6 Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films R. O. Dillon;John A. Woollam;V. Katkanant
  19. Appl. Phys. Lett. v.54 no.10 Role of the oxygen atomic beam in low-temperature growth of superconducting films by laser deposition J. P. Zheng;Q. Y. Ying;S. Witanachchi;Z. Q. Huang;D. T. Shaw;H. S. Kwok
  20. The Korea-Japan Joint Workshop on Plasma Technologies and Applications Laser energy density dependence of pulsed laser deposited $Pb_{-x}La_xTiO_3$ thin films Dong Seog Eun;Sang Yeol Lee
  21. Metals Handbook - Volume 10 materials characterization Ruth E. Whan(et. al.)
  22. Thin Solid Films v.290-292 XPS investigation of Ti-O containing diamond-like carbon films U. Muller;R. Hauert
  23. J. Vac. Sci. Technol. A v.14 no.2 Characterization of amorphous carbon thin films M.A. Capano;N.T. McDevitt;R.K. Singh;F. Qian
  24. Thin Solid Films v.226 Optical absorption and photoluminescence of unhydrogenated carbon films Li Qingshan;Fang Rongchuan;Ma Yurong