Analysis of Impedance and Stray Inductance for Pulsed Plasma Reactor

펄스 플라스마 반응기에 대한 임피던스 및 누설 인덕턴스 분석

  • Published : 1999.04.01

Abstract

In this paper, the impedance characteristic of wire-plate pulsed plasma reactor was investigated by experiment. The experiment have carried out under the several conditions of voltage, wire length and wire-plate distance. The impedance of reactor wad decreased with increasing voltage and wire length. The nature of discharge in reactor was changed from streamer corona to spark with increasing incident energy, from which we understood the critical energy density between the two discharges. Fromthis experiment, we proposed the method for the impedance matching between pulse generator and pulsed plasma reactor. Additionally, we succeeded in the analysis ofstray inductance of 0.5MW reactor using EMTP (ElectroMagnetic Transients Program). This means that EMTP is also useful for the analysis of inevitable stray inductance of forthcoming a large scale reactor.

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References

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