The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

The Micro Electromagnetic Force Measurement of Voice-coil Actuator using Semiconductor Piezoresistive Type Vibration Sensor

실리콘 압저항형 진동 센서를 이용한 Voice-coil형 구동기의 미소 전자력 측정

  • Published : 1999.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

Semiconductor piezoresistive type vibration sensor was fabricated by using semiconductor process and micromachining technology. To measure the micro electromagnetic force between coil and magnet, fabricated vibration sensor was used. Toapply micro electromagnetic force produced from the micro exciter, small-sized NdFeB permanent magnet was attached on the mass of the fabricated vibration sensor. The measured electromagnetic force are about 5~180dyne when the applied sinusoidal current of 1KHz in the range of 1.5~8mA. The measurement of micro electromagnetic forcewas performed by changing the distance between coil and magnet. Output characteristics of micro electromagnetic force according to the applied coil current were linear. Furthermore, output results were used to get the transfer constant that is important to decide the efficiency and the performance of the coil and magnet.

Keywords

References

  1. Technical Digest of The 14Th Sensor Symposium Differential Capacitance Microaccelerometer Using Multi-layer Electroplating Technology Yoshihiro Konaka;Mark G. Allen
  2. Technical Digest of The 14Th Sensor Symposium A Study of Three Dimensional Polysilicon Type Accelerometer Using Silicon Direct Bonding Technology Kijin Kwon;Yoshinori Matsumoto;Hidekazu Tanaka;Makoto Ishida;Sekwang Park
  3. International Conference on Solid State Sensors and Actuators v.2 A New Type Optical Fiber Vibration Sensor Mitsuteru Kimura;Katsuhisa Toshima
  4. Field and Wave Electromagnetics David K. Cheng
  5. Otolaryngologic Clinics of North America v.28 no.1 Engineering principles of mechanical stimulation of middle ear W. H. Ko;W. L. Zhu;A. J. Maniglia
  6. International Conference on Solid State Sensors and Actuators v.1 A Micro-machined Loudspeaker for The Hearing Impaired M. A. Harradine;T. S. Birch;J. C. Stevens;C. Shearwood
  7. International Conference on Solid State Sensors and Actuators v.1 Partially Implantable Vibrating Ossicular Prosthesis Timothy G. Dietz;Geoffrey R. Ball;Bob H. Katz
  8. International Conference on Solid State Sensors and Actuators v.2 Three Axis Piezoresistive Accelerometer Using Polysilicon Layer Kijin Kwon;Sekwang Park
  9. Sensors and Actuators v.A66 A Bulk-micromachined Three-axis Accelerometer Using Silicon Direct Bonding Technology and Polysilicon Layer Kijin Kwon;Sekwang Park