Journal of Sensor Science and Technology (센서학회지)
- Volume 8 Issue 2
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- Pages.171-176
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- 1999
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Fabrication of ${\gamma}-Fe_2O_3$ Thin Film for Chemical Sensor Application
화학센서용 다공성 ${\gamma}-Fe_2O_3$ 박막 제조
- Kim, Bum-Jin (Dept. of Materials Engineering Chungbuk National University) ;
- Lim, Il-Sung (Dept. of Materials Engineering Chungbuk National University) ;
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Jang, Gun-Eik
(Dept. of Materials Engineering Chungbuk National University)
- Published : 1999.03.31
Abstract
PECVD법을 이용하여
Keywords