Journal of Sensor Science and Technology (센서학회지)
- Volume 8 Issue 6
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- Pages.481-486
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- 1999
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
A study on the Fabrication and Characterization of Alumina Electrostatic Chuck for Silicon Wafer Processing
실리콘웨이퍼 공정용 알루미나 정전척의 제작과 특성에 관한 연구
- Jeong, Kwang-Jin (School of Mat.Sci. & Metal. Eng., Univ. of Ulsan) ;
- Park, Yong-Gyun (School of Mat.Sci. & Metal. Eng., Univ. of Ulsan) ;
- Lee, Young-Seop (School of Mat.Sci. & Metal. Eng., Univ. of Ulsan) ;
- Cho, Tong-Yul (School of Mat.Sci. & Metal. Eng., Univ. of Ulsan) ;
- Chun, Hui-Gon (School of Mat.Sci. & Metal. Eng., Univ. of Ulsan)
- 정광진 (울산대학교 재료금속공학부) ;
- 박용균 (울산대학교 재료금속공학부) ;
- 이영섭 (울산대학교 재료금속공학부) ;
- 조동율 (울산대학교 재료금속공학부) ;
- 천희곤 (울산대학교 재료금속공학부)
- Published : 1999.11.30
Abstract
Alumina electrostatic chucks for silicon wafer process with wide range of electrical resistivity were fabricated by controlling the amount of
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