Journal of Korean Ophthalmic Optics Society (한국안광학회지)
- Volume 3 Issue 1
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- Pages.115-120
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- 1998
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- 1226-5012(pISSN)
XPS Analysis of TiNx Thin Films by RF Magnetron Sputtering
RF magnetron 스파터링법으로 제작한 TiNx 박막의 XPS 분석
- Park, Moon Chan (Department of Ophthalmic Optics, Shinheung College) ;
- Oh, Jeong Hong (Department of Physics, Inha University) ;
- Hwangbo, Chang Kwan (Department of Physics, Inha University)
- Received : 1998.11.30
- Published : 1998.12.31
Abstract
The
RF(radio-frequency) magnetron 스퍼터링 장치에 질소가스와 아르곤가스를 동시에 주입하면서 Ti 타켓을 스퍼터링하여
Keywords