The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
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Target-Composition Effect on Hydroxyapatite Thin Films Coated on Titanium by r.f. Sputtering

  • Hamagami, Jun-ichi (Department of Applied Chemistry, Tokyo Metropolitan University, Institute for Medical and Dental Engineering, Tokyo Medical and Dental University) ;
  • Kokubu, Daisuke (Department of Applied Chemistry, Tokyo Metropolitan University, Institute for Medical and Dental Engineering, Tokyo Medical and Dental University) ;
  • Umegaki, Takao (Department of Applied Chemistry, Tokyo Metropolitan University, Institute for Medical and Dental Engineering, Tokyo Medical and Dental University) ;
  • Yamashita, Kimihiro (Department of Applied Chemistry, Tokyo Metropolitan University, Institute for Medical and Dental Engineering, Tokyo Medical and Dental University)
  • Published : 1998.12.01
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Abstract

Using calcium-phosphate-powder targets with the Ca/P ratios of 1.0-1.67, hydroxyapatite ($Ca_{10}(PO_4)_6(OH)_2$, HAp) thin films with 4-7㎛ thickness were prepared on titanium metal plates by r.f. magnetron sputtering, followed an annealing at $200^{\circ}C$ for 24 hr under a high water vapor pressure using an autoclave. All the specimens were systematically characterized by XRD, FT-IR, SEM and EDS analyses. The post-annealed films were confirmed to be a nonstoichiometric oxyhydroxyapatite by XRD and FT-IR measurements.

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