한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)
- 제15권12호
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- Pages.55-61
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- 1998
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
미세 축ㆍ구멍 가공을 위한 미세방전가공기의 개발
Development of Micro-EDM Machine for Microshaft and Microhole Machining
초록
Recently, the needs of machining technologies of very small parts have been increasing with advent of micro-revolution. These technologies have mostly used the method applied to semi-conductor production process such as LIGA, etc. But they have serious difficulties to settle down in terms of workpiece materials, machining thickness, 3-dimensional structure. Therefore. mciro-machining technology using EDM(Electrical Discharge Machining) was proposed. It is very difficult to machine the micro-parts (microshaft, microhole) using conventional machining. Micro-machining using BDM can machine the micro-parts easily because it requires little machining force. This MEDM(Micro-EDM) need the capabilities to move a electrode and control a discharge energy precisely, and the gap control strategy to maintain the optimal discharge condition is necessary. Therefore, in this study, the new EDM machine with high precision motion stage and high-performance EDM device was developed. Using this MEDM machine, we have machined microshaft and microhole with various shapes and sizes.