한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제11권11호
  • /
  • Pages.996-1000
  • /
  • 1998
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  • 1226-7945(pISSN)
  • /
  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

맴브레인 구조를 이용한 미세발열체형 유량센서의 제작과 그 특성

Fabrication on Microheater Flow Sensors Using Membrane Structure and Its Characteristics

  • 정귀상 (동서대학교 전자기계공학부) ;
  • 노상수 (동서대학교 전자기계공학부)
  • 발행 : 1998.11.01
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초록

This paper describes the characteristics of Pt microheater using aluminum oxide films as medium layer and its application to flow sensors. Pt microheater have heating temperature of $390^{\circ}C$ at heating power of 1.2 W. Output voltages of flow sensors which were fabricated by integrating sensing-part with heating-part increase as gas flow rate and its conductivity increase. At $O_2$ flow rate of 2000 sccm, heating power of 0.8 W, output voltage of flow sensor is 101 mV under bridge-applied voltage of 5 V.

키워드

참고문헌

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