한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제31권3호
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- Pages.133-141
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- 1998
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
Suputtering 조건에 따른 Ti$_{x}$ N Coating 층의 색상과 집합조직에 관한 연구
A study on the Color and Texture of Ti$_{x}$ N Coating with Sputtering Condition
초록
Stainless is widely used for various purposes due to its good corrosion resistance. There has been much research to produce the color stainless steel by several methods. In this experiment, TixN films have been deposited on the SUS304 substrate by the DC magnetron sputtering system and the color and texture of the films as a function of coating conditions has been studies. The TixN films showed a (111) preferred orintation in bias-free conditions. The texture of coated later was changed from (111) to (200) to (2200 with a change of the bias from -1000V to -3000V. When the bias is low, coated elements have low energy. Therefore, the texturct (111) of low surface energy. The mobility of atoms was increased with the increase of the blas and texture was changed to the other plane. Non-etched specimens all exhibited strong (111) texture. This result shows that (111) is a loose plane and of non-etched specimens all exhibited. High growing velocity of (111) of especially was main texture of Non-etched specimens. Low working pressure(
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