한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제31권1호
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- Pages.34-44
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- 1998
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
DC magnetron Sputtering 법으로 제작한 Ti$_{x}$ N 박막의 밀착력에 미치는 코팅조건의 영향
Effects of coating Condition on Adhesive strength Ti$_{x}$ N Films Prepared by the DC Magetron Sputtering Method
초록
Stainless steel is being used widely lor various purposes due to its good corrosion resistance. There has becn much research to produce colored stainless sterl by several methods. In this experiment, we coated TixN film on the SUS304 substrate with thc DC magnetron sputtering system and studied the internal structurc and adhesive strength of the films as a function of the coating conditions. Before lhe specimen was coated, a sputter etching was very effective in removing the
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