Effects of coating Condition on Adhesive strength Ti$_{x}$N Films Prepared by the DC Magetron Sputtering Method

DC magnetron Sputtering 법으로 제작한 Ti$_{x}$N 박막의 밀착력에 미치는 코팅조건의 영향

Stainless steel is being used widely lor various purposes due to its good corrosion resistance. There has becn much research to produce colored stainless sterl by several methods. In this experiment, we coated TixN film on the SUS304 substrate with thc DC magnetron sputtering system and studied the internal structurc and adhesive strength of the films as a function of the coating conditions. Before lhe specimen was coated, a sputter etching was very effective in removing the$\delta$ Fe(BCC) phase as well as the contaminant and oxide layer as well as increasing rotghness. Five-stage failure mode appeared with increased scratch load with the TIN films coated on the SUS304 in this manner ; tensile failure-,conformal failure-,buckling failure->chipping failurc and spalling Failure. When the failure was terminated at the initial stage, the film will have good adhesion. But, if syalling failure has occurred at the initial scratch, then the adhesion will be poor. The interlayer between thc coated film and thc substratc was homogeneously adhcsive when the $\gamma'-Fe_4N$ phase wasn't detected in the XRD analysis and the adhesive strength only was reduced by surPace defects. But, when the ,$\gamma'-Fe_4N$N phasc was detected in the XRD analysis, the adhesive strength was very poor.