한국진공학회지 (Journal of the Korean Vacuum Society)
- 제7권s1호
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- Pages.190-196
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- 1998
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- 1225-8822(pISSN)
Optical properties of amorphous $Si_xC_yN_z$ ternary thin films prepared by plasma enhanced chemical vapor deposition
- Zhang, Z.H. (Department of Physics, Wuhan University) ;
- Fan, X.J. (Department of Physics, Wuhan University) ;
- Guo, H.X. (Department of Physics, Wuhan University) ;
- Zhang, W. (Department of Physics, Wuhan University) ;
- Zhang, C.Y. (Department of Physics, Wuhan University) ;
- Luo, F.Y. (Department of Physics, Wuhan University)
- 발행 : 1998.07.01
초록
Amorphous ternary
키워드