Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 7 Issue s1
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- Pages.57-77
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- 1998
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- 1225-8822(pISSN)
Temperature dependence of Heteroeptaxial $Y_2O_3$ films grown on Si by ionized cluster beam deposition
- Cho, M.-H. (Atomic-scale Surface Science Research Center & Department of Physics, Yonsei University) ;
- Ko, D.-H. (Department of Ceramic Engineering, Yonsei University) ;
- Whangbo, S.W. (Atomic-scale Surface Science Research Center & Department of Physics, Yonsei University) ;
- Kim, H.B. (Atomic-scale Surface Science Research Center & Department of Physics, Yonsei University) ;
- Jeong, K.H. (Atomic-scale Surface Science Research Center & Department of Physics, Yonsei University) ;
- Whang, C.N. (Atomic-scale Surface Science Research Center & Department of Physics, Yonsei University) ;
- Choi, S.C. (Thin Film Science & Technology Center, Korea Institute of Science and Technology) ;
- Cho, S.J. (Department of Physics, Kyungseong University)
- Published : 1998.07.01
Abstract
Heteroepitaxial
Keywords