첨가제가 AFD법에 의해 제조된 광소자용 Sodium Borosilicate 박막의 물성에 미치는 영향

Effects of Additives on the Characteristics of Sodium Borosilicate Thin Film Fabricated by AFD Method

  • 정형곤 (전남대학교 자연과학대학 물리학과) ;
  • 전영윤 (정보통신부 정보통신연구관리단) ;
  • 문종하 (전남대학교 공과대학 세라믹공학과) ;
  • 정석종 (전남대학교 자연과학대학 물리학과) ;
  • 이형종 (전남대학교 자연과학대학 물리학과)
  • 발행 : 1998.08.01

초록

$AI_{2}$$O_{3}$$Na_{2}$O가 AFD법에 의해 제조된 sodium borosilicate 유리박막의 특성에 미치는 영향을 조사하였다. $AI_{2}$$O_{3}$함량이 증가함에 따라 $66SiO_2-27B_2O_3-7Na_2O$유리박막의 상분리는 억제되었으며, 6.0wt%의$ AI_{2}$$O_{3}$가 첨가되었을 때 공기중 급냉조건하에서 상분리가 없는 유리박막이 얻어졌다. $AI_{2}$$O_{3}$함량이 1.5에서 6.0wt%로 증가함에 따라 유리박막의 굴절율은 1.4610에서 1.4701로 선형적으로 증가하였으며, 복굴절률을 나타내는 TE 모드와 TM 모드의 차이도 점차적으로 증가하였다. 그러나 복굴절률은 유리박막을 전이온도 이하에서 재열처리함으로써 감소시킬 수 있었다. $66SiO_2-27B_2O_3-7Na_2O$+6wt% $AI_{2}$$O_{3}$$Na_2O$의 함량을 증가시켜 Na2O/B2O3가 0.23, 0.34, 0.45, 0.56인 유리박막을 제작하였다. Na2O/B2O3의 비가 증가함에 유리박막의 굴절율 및 복굴절률은 증가하는 경향이 있었다. 또한 $Na_2O/B_2O_3$의 비가 증가함에 따라 유리박막의 상분리는 가속화되었다.

The effects of $AI_{2}$$O_{3}$ and the ratio of $Na_2O/B_2O_3$ on the phase separation and optical properties of sodium borosilicate glass film fabricated by AFD(Aerosol Flame Deposition) were investigated. When AI,O, of 6wt% was added to $66SiO_2-27B_2O_3-7Na_2O$ the clear glass film without any crystallization was produced under air-quenching condition after consolidation. As the amount of $AI_{2}$$O_{3}$ increased from 1.5 to 6.0 wt% the refractive index linearly increased from 1.4610 to 1.4701, and the difference of TE and TM mode causing by residual stress in film increased gradually. However, the difference of TE and TM mode to reveal birefringence could be minimized by annealing below the glass transition temperature after consolidation and air quenching. On the other hand. as the ratio of $Na_2O/B_2O_3$ increased the refractive index and birefringence of glass film tended to increase, but the measurement of their values were not available at over the critical ratio of $Na_2O/B_2O_3$, because of the cloudiness due to crystallization. The phase separation was greatly accelerated with increasing the ratio of $Na_2O/B_2O_3$.

키워드

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