한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제11권10호
  • /
  • Pages.903-910
  • /
  • 1998
  • /
  • 1226-7945(pISSN)
  • /
  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

Wet Oxygen 분위기로 제작한 z-cut $Ti;LiNbO_3$도파로 광특성 및 두께에 따른 삽입손실

z-cut $Ti;LiNbO_3$ Waveguide Optical Properties and lnsertion Loss As a Function of $Ti;LiNbO_3$thickness Fabricated by wet Oxygen Atmosphere

  • 김성구 (전자부품종합기술연구소 통신부품연구센터) ;
  • 윤형도 (전자부품종합기술연구소 통신부품연구센터) ;
  • 윤대원 (전자부품종합기술연구소 통신부품연구센터) ;
  • 박계춘 (목포대학교 공과대학 정보통신공학부) ;
  • 정해덕 (목포대학교 공과대학 정보통신공학부) ;
  • 이진 (목포대학교 공과대학 정보통신공학부)
  • 발행 : 1998.10.01
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초록

Ti:LiNbO$_3$ optical waveguides have been fabricated by Ti-diffusion in wet oxygen atmosphere. The fabrication conditions of furnace temperature, diffusion time and bubbler temperature were 105$0^{\circ}C$, 8 hours and 9$0^{\circ}C$, respectively and Ti thickness was varied from 700$\AA$ to 1500$\AA$. In this paper, the nearfield patterns, mode sizes (hirizontal/vertical) and insertion loss of waveguides were discussed at wavelength 1550 nm ad function of Ti thickness. With the planar waveguide, the effective index change and diffusion depth were calculated at 632.8nm using the prism coupling method. From these results, the best Ti thickness in our conditions seems like to by 1200$\AA$~1300$\AA$.

키워드

참고문헌

  1. 전자공학회지 v.21 no.2 광통신용 LiNbO₃광집적소자의 기술발전 동향 정홍식
  2. NTT R&D v.42 no.5 Future prospects of very high-speed lightwave communications technologies H.ISHIO;M.SARUWATARI
  3. Optronics v.5 波長 多重を用いた大容量光傳送技術
  4. Optronics no.7 Ti:LiNbO₃道破路デバイスの實用化
  5. Optical Integrated Circuits H.NISHIHARA
  6. Appled Optics v.19 no.4 Optical properties of Titanium-diffused LiNbO₃strip waveguides and their coupling-to-a-fiber characteristics Masaharu Fukuma;Juichi Noda
  7. Appled Optics v.49 no.7 Optical properties in titanium-diffused LiNbO₃strip waveguides Masuharu Fukuma;Juichi Noda;Hiroshi Iwasaki
  8. J. Appl. Phys. v.49 no.6 Effect of Mg diffusion on Ti-diffused LiNbO₃waveguides Juichi Noda;Masaharu Fukuma;Shoichi Sato
  9. Appl. Phys. v.A no.32 Refractive index profiles of LiNbO₃:Ti waveguides J.Vollmer;J.P.Nisius;P.Hertel;E.Kratzig
  10. High efficiency single mode fibre to Ti:LiNbO₃ waveguide couping v.18 no.1 V.Ramaswamy;R.C.Alferness;M.Divio