A Study on SOI-like-bulk CMOS Structure Operating in Low Voltage with Stability

저전압동작에 적절한 SOI-like-bulk CMOS 구조에 관한 연구

  • 손상희 (청주대학교 공대 반도체공학과) ;
  • 진태 (청주대학교 공대 반도체공학과)
  • Published : 1998.06.01

Abstract

SOI-like-bulk CMOS device is proposed, which having the advantages of SOI(Silicon On Insulator) and protects short channel effects efficiently with adding partial epitaxial process at standard CMOS process. SOI-like-bulk NMOS and PMOS with 0.25${\mu}{\textrm}{m}$ gate length have designed and optimized through analyzing the characteristics of these devices and applying again to the design of processes. The threshold voltages of the designed NMOS and PMOS are 0.3[V], -0.35[V] respectively and those have shown the stable characteristics under 1.5[V] gate and drain voltages. The leakage current of typical bulk-CMOS increase with shortening the channel length, but the proposed structures on this a study reduce the leakage current and improve the subthreshold characteristics at the same time. In addition, subthreshold swing value, S is 70.91[mV/decade] in SOI-like-bulk NMOS and 63.37[mV/ decade] SOI-like-bulk PMOS. And the characteristics of SOI-like-bulk CMOS are better than those of standard bulk CMOS. To validate the circuit application, CMOS inverter circuit has designed and transient & DC transfer characteristics are analyzed with mixed mode simulation.

Keywords

References

  1. 대한전기학회 논문지 v.46 no.11 단채널 효과를 극복할 수 있는 새로운 T자 형태의 게이트를 갖는 Grooved Gate MOSFET 소자구조에 관한 연구 손상희;진태
  2. IEDM A Sub_0.1㎛ Grooved Gate MOSFET with High Immunity to Short Channel Effects Junko Tanaka(et al.)
  3. Tech. Digest of IEDM Recent Advances in SOI Technology Jean-Pierre Colinge
  4. Silicon on Insulator Technology : Materials to VLSI Colinge, J. P.
  5. IEEE Electron Devices, Letters v.15 no.4 Measurement of Substrate Current SOI MOSFET's Cuong T. Nguyen(et al.)
  6. IEEE Electron Devices Letters v.15 no.1 Recessed-Channel Structure for Fabricating Ultrathin SOI MOSFET with Series Resistance Mansum Chan(et al.)