Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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A Study on the Dielectric Properties of (BaBi$_{0.5}$Sr$_{0.5}$)TiO$_3$ Thin Films Diffused with PbO-Bi$_2$O$_3$-B$_2$O$_3$ Layer

PbO-Bi$_2$O$_3$-B$_2$O$_3$ 확산시킨 (BaBi$_{0.5}$Sr$_{0.5}$)TiO$_3$ 박막의 유전물성에 관한 연구

  • Kim, Jin-Cheol (Department of Materials Science and Engineering, Korea University) ;
  • Jin, Byung-Tae (Department of Ceramic Science and Engineering, Changwon National University) ;
  • Park, Won-Mo (Department of Materials Science and Engineering, Korea University) ;
  • Nahm, Sahn (Department of Materials Science and Engineering, Korea University) ;
  • Kim Myong-Ho (Department of Ceramic Science and Engineering, Changwon National University) ;
  • Byun, Jae-Dong (Department of Materials Science and Engineering, Korea University)
  • 김진철 (고려대학교 재료공학과) ;
  • 진병태 (창원대학교 세라믹공학과) ;
  • 박원모 (고려대학교 재료공학과) ;
  • 남산 (고려대학교 재료공학과) ;
  • 김명호 (창원대학교 세라믹공학과) ;
  • 변재동 (고려대학교 재료공학과)
  • Published : 1998.09.01
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References

  1. IEDM,Technical Digest v.91 A Stack Capacitor with ($Ba_λ$$ Sr_1-x$)TiO₃ for 256M DRAM K. Koyama;T. Sakuma;S. Yamamichi;H. Watanabe;H. Aoki;S. Ohya;Y. Miyasaka;T. Kikkawa
  2. Jpn. J. Appl. Phys. v.33 Control of Grain Structure of Laser-Deposited (Ba₃Sr)TiO₃ Films to Reduce Leakage Current P. Bhattacharya;K. Park;Y. Nishioka
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  4. J.Kor.Ceram.Soc. v.33 no.1 WO₃를 첨가한 SrTiO₃의 전기적 성질에 미치는 결정립계의 영향 유인규;김윤호;김효태;변재동
  5. J.Am.Ceram.Soc. v.68 no.4 Microstructure of SrT₁O₃ Internal Boundary Layer Capacitors During and After Processing and Resultant Electrical Properties M. Fujmoto;W. David Kingery
  6. 특허출원 제 38010호 유전체 박막 내부의 결함내에 절연층을 갖는 DRAM 용 캐패시터 및 제조방법 변재동;김명호;서동량;남산
  7. 통산산업부 산·학·연 공동기술개발 연구보고서 반도성 세라믹 콘덴서의 제조공정 김명호