The Effect of CVD Reaction Variable on SnO2 Powder Characteristics

  • Kim, Kyoo-Ho (Shool of Metallurgical and Materials Engineering, Yeungnam University)
  • Published : 1998.09.01

Abstract

Ultrafine $SnO_2$ powder was prepared by the diffusion mixing gas-phase reaction of $SnCl_4$(g) and water vapor. The effects of reaction variables, such as the chloride partial pressure, the reaction temperature, and the residence time is the reactor, on the powder size were examined systematically. Calculated concentration and distribution of chemical species, using the Burke-Schumann diffusion mixing model, were compared with the experimetal results. The effects of the reaction variables on the powder size were also discussed qualitatively.

Keywords

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