정전용량 주사형 데시미크론 현미경의 구현

Implementation of scanning capacitance decimicron microscope

In this study, we implemented a scanning capacitance decimicron micorscope(SCdM) which scans a surface of the object mechanically in two or two point five dimensions with a stylus of size 0.2.mu.m. X-Y stage and stylus driving method are used as the scanning method, and VHD disk plate and IC chip are used as the object. Experimenal resutl of these object show that SCdM obtain 0.1.mu.m resolution power which exceeds that of optical microscope, and this microscope will be used as a powerful tool for inspecting ULSI pattern or biological data as a decimicron mcirocope which zoom a function of optical microscope and guide STM. The experimental system is composed of a VHD video disk method which captures the capacitance changes of the video disk suface and converts it into video signal.