Journal of the Korean Institute of Telematics and Electronics D (전자공학회논문지D)

The Institute of Electronics and Information Engineers (대한전자공학회)
권호 표지

Fabricationof small size catridge for electrolyte measurement including flow-channel and microsensors

Flow-channel과 microsensor를 내장한 전해질 측정용 소형 카트리지 제작

  • 이영철 (경북대학교 센서공학과) ;
  • 조병욱 (경북대학교 전자공학과) ;
  • 김창수 (경북대학교 센서기술연구소) ;
  • 고광락 (경북대학교 센서기술연구소) ;
  • 손병기 (경북대학교 전자공학과)
  • Published : 1998.04.01
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Abstract

A small size cartrideg for FET type electrolyte sensor is designed and faricated with much simplified process by using micromachining tenchiques such as silicon etching andglass bonding. Size of the whole cartideg is 2.4cm*2.5cm, and the dead volume of a micro flow-channel in the cartrideg is only 8.5.mu.l. The photosensitive polymer(THB 30) is used to define a micropool and to encapsulate the sensor surface for standardizationof electrolyte sensors. To miniaturize micro flow-channel conventional reference electrode(Ag/AgCl) a differential amplification is introduced using REFET and quasi reference electrode. Refet was fabricated using photosensitive polymer(OMR 83). The fabricated cartridge with built-in pH-ISFET showed good operational characteristics such as linearity and high sensitivity (55.4mV/pH) in a wide pH range(pH2-pH12).

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