Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Phase unwrapping enhancement of phase shift interferometry by using lateral scanning

횡방향 주사를 이용한 광위상 간섭계의 페이즈 언래핑 향상에 대한 연구

  • Park, Do-Min (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
  • Park, Sung-Lim (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
  • Gweon, Dae-Gab (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 박도민 (한국과학기술원 대학원 기계공학과) ;
  • 박성림 (한국과학기술원 대학원 기계공학과) ;
  • 권대갑 (한국과학기술원 기계공학과)
  • Published : 1998.03.01
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Abstract

The biggest problem common on to all forms of Phase Shift Interferometer is unwrapping the phase. Simple phase unwrapping algorithms assume that every pixel is within radians of its neighbors. If this is true, any reasonable algorithm will return the correct unwrapped phase. If not, correct unwrapped phase will not be obtained. In rough surface, frequently, neighboring pixels have phase steps greater than. This paper proposes the new method which makes phase steps smaller than by sub-pixel movement.

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