센서학회지 (Journal of Sensor Science and Technology)
- 제7권2호
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- Pages.117-123
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- 1998
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
스핀 코팅에 의한 $In_{2}O_{3}$ 박막의 가스감지특성
Gas sensing properties of $In_{2}O_{3}$ thin film prepared by spin-coating method
- Chung, Wan-Young (Dept. of Electronic Engineering, Semyung University) ;
- Lim, Jun-Woo (School of Electronic and Electrical Engineering, Kyungpook National University) ;
- Lee, Duk-Dong (School of Electronic and Electrical Engineering, Kyungpook National University) ;
- Yamazoe, Noboru (Dept. of Materials Science and Technology, Kyushu University)
- 발행 : 1998.03.31
초록
알루미나 기판위에 스핀코팅에 의해
The
키워드