Journal of Sensor Science and Technology (센서학회지)
- Volume 7 Issue 2
- /
- Pages.117-123
- /
- 1998
- /
- 1225-5475(pISSN)
- /
- 2093-7563(eISSN)
Gas sensing properties of $In_{2}O_{3}$ thin film prepared by spin-coating method
스핀 코팅에 의한 $In_{2}O_{3}$ 박막의 가스감지특성
- Chung, Wan-Young (Dept. of Electronic Engineering, Semyung University) ;
- Lim, Jun-Woo (School of Electronic and Electrical Engineering, Kyungpook National University) ;
- Lee, Duk-Dong (School of Electronic and Electrical Engineering, Kyungpook National University) ;
- Yamazoe, Noboru (Dept. of Materials Science and Technology, Kyushu University)
- Published : 1998.03.31
Abstract
The
알루미나 기판위에 스핀코팅에 의해
Keywords