센서학회지 (Journal of Sensor Science and Technology)
- 제7권2호
- /
- Pages.83-89
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- 1998
- /
- 1225-5475(pISSN)
- /
- 2093-7563(eISSN)
고주파 마그네트론 스퍼터링에 의한 $TiO_{2-x}$ 박막 습도센서의 습도감지특성
Hygroscopic Characteristics of $TiO_{2-x}$ Thin Film Humidity Sensors by RF Magnetron Sputtering
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Lee, Sung-Pil
(Dept. of Electronic Engineering, Kyungnam University) ;
- Yoon, Yeu-Kyung (Dept. of Electronics, Masan Changshin College)
- 발행 : 1998.03.31
초록
키워드