Journal of Sensor Science and Technology (센서학회지)
- Volume 7 Issue 5
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- Pages.372-376
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- 1998
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Preparation of $NbS_2$ thin film using PLD method
PLD 장치를 이용한 $NbS_2$ 박막의 제작
- Park, Jong-Man (Dept. of Physics, Pukyong National University) ;
- Lee, Hea-Yeon (Dept. of Physics, Pukyong National University) ;
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Jeong, Jung-Hyun
(Dept. of Physics, Pukyong National University)
- Published : 1998.09.30
Abstract
We developed a pulsed laser deposition(PLD) apparatus for depositing various thin films. In this study, the formation of
기능성 소자 응용을 위한 다양한 박막을 성장시키기 위하여 PLD(Pulsed Laser Deposition) 장치를 제작 개발하였다. 이 PLD 장치를 이용하여
Keywords