Abstract
Ultrafine silicon dioxide($SiO_2$) powder was prepared from tetraethylorthosilicate(TEOS) by the gas-phase reaction. The effects of reaction temperature, flow rate of gas, TEOS concentration, and preheating temperature of reactants on the particle size were investigated. As the reaction temperature increased, average particle size of the silicone dioxide powder became smaller. Smaller particles were also obtained with decreasing the residence time of reactants in the reaction zone. Larger particles having narrow size distribution were produced with the high concentrations of the reactants. The effect of the preheating temperature was not considerable on the average particle size. The range of average particle size was from 30 nm to 58 nm depending on experimental conditions.
유기금속화합물인 Tetraethylorthosilicate(TEOS)를 출발원료로 기상열분해법을 이용하여 초미립 실리카분말을 제조하였다. 반응온도, 가스유량, 반응물질의 농도, 및 반응물질의 예비가열온도가 초미립 실리카분말의 입자크기 특성에 미치는 영향을 조사하였다. 반응온도가 증가할수록 또한 체류시간이 감소할수록 생성분말의 입자크기가 작아지는 것을 알 수 있었다. 반응물농도가 증가할수록 입자크기가 증가하였고, 또한 반응물질의 예비가열온도가 증가하여도 입자크기는 큰 변화가 없음을 알 수 있었다. 본 연구조건에서 제조된 초미립 실리카분말의 평균 입자크기는 30~58 nm이었다.
