저결함 압전수정의 성장과 결함분석

Growth of Low Defect Piezo-quartz and Defect Analysis

수열법을 이용하여 압전수정을 성장하고 각종 성장결함을 분석하였다. 4 중량퍼센트 NaOH, 성장온도 $340-360^{\circ}C$, 온도구배 $20-40^{\circ}C$의 성장조건에서 (0001)방향의 ZY 종자결정, 합성수정을 원료로 하였을 경우 성장속도는 0.25-0.65 mm/day 였다. 원료로써 합성수정을 사용하고 저전위 종자결정 위에서 수평 종자결정 배치법으로 성장된 압전수정의 전위밀도는 20.0개/$cm^2$, 에치채널 밀도는 5.0개/$cm^2,\;10\mu$ 이상의 함유물 농도는 2.4개/$cm^3$, 알파값은 0.019였으며, IEC 758규격에 의한 등급분류는 에치채널 밀도 1등급, 함유물 농도 Ia등급, 알파값 A등급이었다.

Quartz single crystals were grown hydrothermally and growth defects such as dislocations, etch channels and impurities were examined. Growth rates were 0.25-0.65 mm/day under the growth conditions of following. 1. Mineralizer: $4wt.\%$ NaOH. 2. Growth temperature: $340-360^{\circ}C$. 3. Temperature gradient: $20-40^{\circ}C$. 4. Seed: ZY plate. 5. Nutrient: synthetic quartz. Defects of the quartz which was grown with optical grade synthetic nutrient, low dislocation density seed and horizontal seed setting technique were as follows. 1. Dislocation density: 20.0 each/$cm^2$. 2. Etch channel density: 5.0 each/$cm^2$ (1st grade by IEC 758 standard). 3. Impurity (larger than 10$\mu$) concentration: 2.4 each/$cm^3$ (Ia grade by IEC 758 standard). 4. Alpha value: 0.019 (A grade by IEC 758 standard).